MELSEC iQ-F SERIES High Speed Counting Module FX5-16ET/ESS-H FX5;High-speed I/O Module;2x 200kHz Counter;2x 200kpps Pulse Outputs;source PRODUCT FX5-16ET/ES-H FX5;High-speed I/O Module;2x 200kHz Counter;2x 200kpps Pulse Outputs;sink PRODUCT